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Gwangmook Kim, YoungJun Cho, Min-Kyun Cho, Dohun Kim, and Wooyoung Shim*
Radio Frequency Cantilever-Free Scanning Probe Microscopy
J. Appl. Phys., 133 (19), 194504
Date: May 21, 2023

Cantilever-free scanning probe microscopy has enormous potential for high-throughput topography imaging using parallel probe arrays. However, the current imaging mechanism of the cantilever-free tip architecture hardly considers the efficiency of the detection method regarding precision and bandwidth, which could be a bottleneck to expanding the application of this measurement system. In this communication, we present a contact resistance-based cantilever-free imaging system using radio frequency (RF) reflectometry. RF reflectometry measurements provide sensitive detection of the contact resistance with a wide bandwidth, enabling sub-micrometer-scale topography imaging. We demonstrated our imaging system using a carbon black-polydimethylsiloxane composite tip with a custom-built RF reflectometry setup. The proof-of-concept system achieved a resolution of 230 nm and a bandwidth of the detection system of approximately 8.5 MHz, validating the feasibility of the imaging technique for potential high-throughput cantilever-free scanning probe microscopy.

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